Product datasheet


Clean room vacuum pump, 600 mmHg, 2.5 l/min, 240 V, HEPA


$513.00    €513.00

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The FV-60 is our largest cleanroom vacuum pump. It is capable of safely handling up to 12 inch (300 mm) wafers (when used with a suitable wand), and is suitable for a wide range of other applications. Fitted with replaceable HEPA filters in both inlet and outlet. It is oil-free for use in the cleanroom and designed for long term high reliability with minimal noise generation. Supplied with 1 m clear flexible vacuum tubing.

  • Flow rate: 2.5 l/min (0.088 cfm).
  • Ultimate pressure: -600 mmHg (-80 kPa).
  • Power supply 240 VAC.
  • Built-in inlet and outlet.
  • HEPA filters.
  • Nylon body for static protection.
  • Compact design.
  • ESD safe tubing (accessory).
  • Static dissipative grounding kit (accessory).
  • HEPA filter kit (replacement part).
  • Compliance with CE regulations.
  • HEPA filters trap 99.97% of all particles down to 0.3 microns.
  • The filter windows indicate when to change HEPA filters.
  • Gross weight including packaging: 1400 g.
  • Material: nylon.

Flow rate2.5 l/min (0.088 cfm)
Ultimate pressure-600 mmHg (-80 kPa)
Power requirement240 VAC
Power consumption10.0 W
Dimensions (D x W x H)137 x 88 x 133 mm
Net weight1250 g
Duty cycleContinuous
Life expectancy>8760 hours
Wafer size8 and 12 inch (200 and 300 mm)