The FV-60 is our largest cleanroom vacuum pump. It is capable of safely handling up to 12 inch (300 mm) wafers (when used with a suitable wand), and is suitable for a wide range of other applications. Fitted with replaceable HEPA filters in both inlet and outlet. It is oil free for use in the cleanroom and designed for long-term high reliability with minimal noise generation. Supplied with 1 m clear flexible vacuum tubing.

• Flow rate: 2.5 l/min (0.088 cfm).
• Ultimate pressure: -600 mmHg (-80 kPa).
• Power supply: 100-120 VAC.
• Built-in inlet and outlet HEPA filters.
• Nylon body for static protection.
• Compact design.
• ESD safe tubing (accessory).
• Static dissipative grounding kit (accessory).
• HEPA filter kit (replacement part).
• Compliance with CE regulations.
• HEPA filters trap 99.97% of all particles down to 0.3 microns.
• The filter windows indicate when to change HEPA filters.
• Gross weight including packaging: 1400 g.
• Material: nylon.