Product datasheet


Clean room vacuum pump, 300 mmHg, 2.5 l/min, 240 V, HEPA


$267.00    €267.00

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The FV-30 is our mid-range vacuum pump. It is capable of safely handling up to 6 inch (150 mm) wafers (when used with a suitable wand), and is suitable for a wide range of other applications. Fitted with replaceable HEPA filters in both inlet and outlet. Supplied with 1 m clear flexible vacuum tubing.

  • Flow rate: 2.5 l/min (0.088 cfm).
  • Ultimate pressure: -300 mmHg (-40 kPa).
  • Power supply: 240 VAC.
  • Built-in inlet and outlet HEPA filters.
  • Oil free for cleanroom use.
  • Long-term high reliability.
  • Designed to minimise noise generation.
  • Nylon body for static protection.
  • Compact design.
  • ESD safe tubing (accessory).
  • Static dissipative grounding kit (accessory).
  • HEPA filter kit (replacement part).
  • Compliance with CE regulations.
  • HEPA filters trap 99.97% of all particles down to 0.3 microns.
  • The filter windows indicate when to change HEPA filters.
  • Gross weight including packaging: 860 g.
  • Material: nylon.

Flow rate2.5 l/min (0.088 cfm)
Ultimate pressure-300 mmHg (-40 kPa)
Power supply240 VAC
Power consumption10.0 W
Dimensions (D x W x H)137 x 88 x 85 mm
Net weight800 g
Duty cycleContinuous
Life expectancy> 8760 hours
Wafer sizeUp to 6 inch