Vacuum handling tools for wafers, die, lense, electronic component semiconductor and parts handling, vacuum pickups/pens.

Product datasheet


FV-60-110

Clean room vacuum pump, 600 mmHg, 2.5 l/min, 110 V, HEPA

The FV-60 is our largest clean room vacuum pump. It is capable of safely handling up to 12 inch (300 mm) wafers (when used with a suitable wand), and is suitable for a wide range of other applications. Fitted with replaceable HEPA filters in both inlet and outlet. It is oil-free for use in the cleanroom and designed for long term high reliability with minimal noise generation. Supplied with 1 m clear flexible vacuum tubing.

  • Flow Rate
  • 2.5 l/min (0.088 cfm)
  • Ultimate pressure -600 mmHg (-80 kPa)
  • Power supply 100-120 VAC
  • Built in inlet and outlet HEPA filters
  • Nylon body for static protection
  • Compact design
  • ESD Safe Tubing (Accessory)
  • Static-Dissipative Grounding Kit (Accessory)
  • HEPA Filter Kit (Replacement Part)
  • Compliance with CE regulations
  • HEPA filters trap 99.97% of all particles down to 0.3 microns
  • The FIlter windows indicate when to change HEPA filters
  • Gross weight including packaging: 1400 g
  • Material: Nylon


ModelFV-60-110
Flow Rate2.5 l/min (0.088 cfm)
Ultimate pressure-600 mmHg (-80 kPa)
Power supply100-120 VAC
Power consumption10.0 W
Dimensions (D x W x H) 137 x 88 x 133 mm
Net weight1250 g
Duty cycleContinuous
Life expectancy> 8760 hours
Wafer size8 and 12-inch (200 and 300 mm)