Vacuum handling tools for wafers, die, lense, electronic component semiconductor and parts handling, vacuum pickups/pens.

Product datasheet


FV-30-110

Clean room vacuum pump, 300 mmHg, 2.5 l/min, 110 V, HEPA

The FV-30 is our mid-range vacuum pump. It is capable of safely handling up to 6 inch (150 mm) wafers (when used with a suitable wand), and is suitable for a wide range of other applications. Fitted with replaceable HEPA filters in both inlet and outlet. Supplied with 1 m clear flexible vacuum tubing.

  • Flow rate 2.5 l/min (0.088 cfm)
  • Ultimate pressure -300 mmHg (-40 kPa)
  • Power supply 100-120 VAC
  • Built in inlet and outlet HEPA filters
  • Oil-free for cleanroom use
  • Long term high reliability Designed to minimize noise generation
  • Nylon body for static protection
  • Compact design
  • ESD Safe Tubing (Accessory)
  • Static-Dissipative Grounding Kit (Accessory)
  • HEPA Filter Kit (Replacement Part)
  • Compliance with CE regulations
  • HEPA filters trap 99.97% of all particles down to 0.3 microns
  • The FIlter windows indicate when to change HEPA filters
  • Gross weight including packaging: 860 g
  • Material: Nylon


ModelFV-30-110
Flow rate2.5 l/min (0.088 cfm)
Ultimate pressure-300 mmHg (-40 kPa)
Power supply100-120 VAC
Power consumption5.0 W
Dimensions (D x W x H)137 x 88 x 85 mm
Net weight800 g
Duty cycleContinuous
Life expectancy> 8760 hours
Wafer sizeUp to 6-inch (150 mm)